科宇系統有限公司

CVmap 3093 AC/BC Features:

• Cassette to cassette version of CVmap 3093 A/B
• 150mm, 200 mm, and 300 mm (6", 8", and 12") capability
• Safety first design principle
• Unique Mercury probe:
  • Dot area 5E-5 to 0.6 cm2
  • Contact area repeatability better 2%
  • Contact configurations: Dot, Dot / Ring, Dot / 2 Rings
  • Refreshed mercury before each contact insures clean contact
  • Probe head easy to change
  • Integrated light source for illumination of measured sample (probe head dependent)
  • Minimal probe head to wafer contact area
  • Non scratching poly-carbonate probe head material
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• Capacitance test:
  • Quasistatic method with square wave signals (internal)
  • High frequency method with square wave signals (internal)
  • Deep pulsed method with square wave signals (internal)
  • Test frequency up to 10kHz (Bandwidth 1 MHz)
  • External C-V meters (Bandwidth:1MHz standard, up to 10MHz optional)
  • Capacitance measurement range: 0 to 20 nF
  • Stray capacitance < 1.5pF (desktop systems)
  • Equivalent oxide thickness by C-V: 1 nm to 2000 nm, repeatability <±1%
  • Bias voltage +/- 100 V
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• Current / Voltage test:
  • Bias voltage +/- 100 V (with external source up to +/- 1000V, optional)
  • Current range: 10fA to 1mA with freely selectable threshold
  • Oxide thickness by I-V method 1.5 nm to 3nm
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• Edge exclusion down to 2mm (probe head dependent)
• Versatility:
  • Connections for external 2 and 4 terminal meters
  • Connections for attaching external probe stage
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• Internal automatic calibration
• Norms and standards:
  • SEMI S2-0200 standard compliant (92A/B)
  • CE mark (European models only)
  • EN55024:1998
  • FCC Part 15 Class A