Wet Series - Wet Chemistry Process monitoring systems
Wet series enable stringent and instant process control which identifies excursions before affecting yields.
*Montoring in-line and on-time
*No sampling or dilution required
*Operating in low costs
*Enable closed loop control
*Temperature compensation
*Self-calibration
可测量的液体种类繁多,请来信或来电询问。
WetCon - Conductive Concentration Analyser
用导电度测量可导电的化学溶液(单一成份Single Component)浓度,有自动校正和温度补偿的功能,可测量DHF、HCl、HNO3、H2SO4、NH3、TMAH、Citric Acid……等液体。
WetRad - Mixing Component Concentration Analyser
从UV/VIS/NIR里选定两个波长,测量混合液(mixing chemicals)的其中一个成份(One chose Component),可测量0˚C到120˚C的化学溶液,采用光学式测量,快速、连续且准确的判读欲知成分浓度,WetRad里有两颗LED灯泡可以互相校正光源,可量测H2O in IPA、H2O in solvent、TMAH、H2O2等等。
WetSpec 201/200 - Mixing Chemical Concentration Analyser
以近红外线技术量测Mixing Chemical里面所有成分的个别浓度值,可测量0˚C到120˚C的化学溶液。WetSpec201用来测量单个化学槽,WetSpec200则可以外接八个化学槽,依化学槽的顺序测量不同化学溶液。WetSpec可以测量的化学液体种类十分多,例如SC1、SC2、SPM、DSP、BOE、solvent、HF/HCl、Al etching、IPA/KOH等等液体,欢迎来信或来电洽询。