科宇系统提供四点探针量测相关设备与探头耗材
Features:
- Automated Sheet Resistivity Meter
- 1 mOhm / square to 800 kOhm / square
- extended range up to 8x1011W/sq
- temperature compensation option
- up to to 8" wafer capability or 156mm x 156mm
- stand alone systems and PC controlled systems with Automap software package
Model 333A Four-Point Probe for 300mm
Features:
- Automated Sheet Resistivity Meter
- 1 mOhm / square to 800 kOhm / square
- extended range up to 8x1011W/sq
- up to to 12" wafer capability
- Automap software package
- SECS-II communication available
- Automatic probe-head switching available
